ALD valves control

[tode89]

Hi everyone,

I'm a PhD student completely new on programming with Labview.

Part of my project is the construction and use of a deposition machine that permits to deposit metals by a process called ALD (Atomic Layer Deposition). This process consist of alternate inlet of reactive gases inside a pumped and warmed chamber, and each inlet followed by a purge time with N2. The process is thermally activated.

For this reason I need to control some machine parts using Labview interfaced to an Arduino Micro. The main parts to control are:

- ALD valves that control the inlet of the reactive gases that give rise to the final film;

- rough and fine pumps for pumping of the chamber;

- an interlock that permit the start on N2 flow in the line only if the chamber has already been pumped, in order to avoid backflow inside the line if the chamber is contaminated;

In particular the ALD valves must be open for a certain time and then close during the purging time, and these two times are different. Right now I managed to switch on-off a valve with a certain frequency, but I'm not able to design a VI that let it open for a certain time and then closed for a different time.

Also the interlock is making me crazy, I was oriented on a case structure that let the N2 to flow only if a certain pressure is reached, but I can't get a proper design.

So any help or advice on this topic would be very appreciated. 

[Freelion8]

Could you attach your code if any?

[tode89]

This is the ALD valve control, I haven't get anything real for interlock. I just started so there is not much to see

[RavensFan]

This sounds like a classic "state machine" application.  There is a template for it in LabVIEW.

Also search the forums for that phrase and start reading.

[maria3]

Hi,

I'm working with an arduino in order to control valves. I have prepared a general Vi in Labview and I want to create a subvi in which I configurate the different valves to the arduino pins. Does someone know how can I prepare that Arduino Subvi and how can I connect it to the general Vi?

Thanks for your attention

Maria